Author:
Yang Zhuoqing,Ding Guifu,Wang Yan,Zhao Xiaolin
Reference72 articles.
1. Cai H, Ding G, Yang Z, Su Z, Zhou J, Wang H (2008a) Design, simulation and fabrication of a novel contact-enhanced MEMS inertial switch with a movable contact point. J Micromech Microeng 18:115033. (10pp)
2. Cai H, Yang Z, Ding G, Zhou Z (2008b) Design and simulation of a contact-enhanced MEMS inertial switch using Simulink and ANSYS. In: 1st international conference of the Chinese society of micro/nano technology, Beijing, vol 2008
3. Cai H, Yang Z, Ding G, Wang H (2009) Development of a novel MEMS inertial switch with a compliant stationary electrode. IEEE Sensors J 9:801–808
4. Chen W, Yang Z, Wang Y, Ding G, Wang H, Zhao X (2014a) Influence of applied acceleration loads on contact time and threshold in an inertial microswitch with flexible contact-enhanced structure. Sensors Actuators A 216:7–18
5. Chen W, Wang Y, Zhang Y, Cheng P, Wang Y, Ding G, Zhao X, Yang Z (2014b) Fabrication of a novel contact-enhanced horizontal sensitive inertial micro-switch with electroplating nickel. Microelectron Eng 127:21–27
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1. A review of MEMS inertial switches;Microsystem Technologies;2019-03-16