Modeling of Electrostatically Actuated Microplates
Author:
Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-10-5945-2_4
Reference35 articles.
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4. Chiou DY, Chen MY, Chang MW et al (2008) Finite element modeling, characterization, and optimization design for the polymer-typed capacitive micro-arrayed ultrasonic transducer[J]. Microsyst Technol 14(6):787–797
5. Elgamel HE (1995) Closed-form expressions for the relationships between stress, diaphragm deflection, and resistance change with pressure in silicon piezoresistive pressure sensors[J]. Sensors Actuators A Phys 50(1–2):17–22
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