Design, Simulation and Optimization of Circular, Square and Hexagonal Shaped Diaphragms for PMUT Application
Author:
Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-19-2308-1_46
Reference14 articles.
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3. Feng G, Liu H, Lai G (2019) Piezoelectric micromachined ultrasonic transducer with a universal bottom-up fabrication approach implemented on a foil as doppler radar for gesture recognition. In: 2019 IEEE 32nd international conference on micro electro mechanical systems (MEMS), pp 779–782
4. Liu X, Chen X, Le X, Xu Z, Wu C, Xie J (2018) A high-performance square pMUT for range-finder. In: 2018 IEEE 13th Annual international conference on nano/micro engineered and molecular systems (NEMS), pp 106–109
5. Roy K, Kalyan K, Ashok A, Shastri V, Pratap R (2021) A PMUT integrated microfluidic system for volumetric flow rate sensing. In: 2021 21st international conference on solid-state sensors, actuators and microsystems (Transducers), pp 172–175
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1. Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications;Biosensors;2022-12-29
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