Author:
Sircar Avirup,Kumar Patra Puneet
Reference47 articles.
1. Vettiger, P., Brugger, J., Despont, M., Drechsler, U., Dürig, U., Häberle, W., et al.: Ultrahigh density, high-data-rate NEMS-based AFM data storage system. Microelectron. Eng. 46(1–4), 11–17 (1999)
2. Martin, F.J., Grove, C.: Microfabricated drug delivery systems: concepts to improve clinical benefit. Biomed. Microdevices 3(2), 97–108 (2001)
3. Hornbeck, L.J.: Bistable deformable mirror device. Spat. Light. Modul. Appl. (1988)
4. Gupta, B., Chevallier, J., Bhushan, B.: Tribology of ion bombarded silicon for micromechanical applications. J. Tribol. 115(3), 392–399 (1993)
5. Bhushan, B.: Nanotribology and nanomechanics: an introduction. Springer Science & Business Media (2008)