Design and Simulation of Bi-metallic RF MEMS Switch for Fast Switching Time
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Publisher
Springer Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-16-1570-2_20
Reference22 articles.
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2. Chakraborty, A., Gupta, B., Sarkar, B.K.: Design, fabrication and characterization of miniature RF MEMS switched capacitor-based phase shifter. J. Microelectron. 45, 1093–1102 (2014)
3. Rebeiz, G.M.: RF MEMS Theory, Design, and Technology, 1st edn. Wiley, New York (2003)
4. Srinivasa Rao, K., et al.: Design, modeling and analysis of perforated RF MEMS capacitive shunt switch. IEEE Access 7, 74869–74878 (2019)
5. Ansari, H.R., Khosroabadi, S.: Design and simulation of a novel RF MEMS shunt capacitive switch with a unique spring for Ka-band application. Microsyst. Technol. https://doi.org/10.1007/s00542-018-3989-9
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1. Design and performance analysis of ohmic contact based SPMT RF MEMS switch;Microsystem Technologies;2023-07-15
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