Effective Method for Temperature Compensation in Dual Band Metal MEMS Resonator
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Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-13-5950-7_20
Reference12 articles.
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3. Gong, S., Piazza, G.: Monolithic multi-frequency wideband RF filters using two-port laterally vibrating lithium niobate MEMS resonators. IEEE J. Microelectromech. Syst. 23(5), 1188–1197 (2005)
4. Zhang, H., Liang, J., Zhou, X., Zhang, H., Zhang, D., Pang, W.: Transverse mode spurious resonance suppression in lamb wave MEMS resonators: theory, modeling, and experiment. IEEE Trans. Electron Devices 62(9), 3034–3041 (2015)
5. Patel, M., Bhattacharjee, K., Reed, J., Zhgoon, S.: Temperature compensation of longitudinal leaky SAW with silicon dioxide overlay. In: Proceedings IEEE Ultrasonic Symposium, pp. 1006–1010 (2008)
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