Low-Pressure, Thermal Direct Bonding of PMMA-Dry Film Photoresist-PMMA for Microdevice Fabrication
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Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-97-0169-8_35
Reference14 articles.
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2. Faghih, M.M., Sharp, M.K.: Solvent-based bonding of PMMA–PMMA for microfluidic applications. Microsyst. Technol. 25(9), 3547–3558 (2019). https://doi.org/10.1007/s00542-018-4266-7
3. Giri, K., Tsao, C.-W.: Recent advances in thermoplastic microfluidic bonding. Micromachines (2022). https://doi.org/10.3390/mi13030486
4. Haiden, C., et al.: Visualisation of suspended nanoparticles by light scattering in a microfluidic chip and manual 2-D tracking for size determination. In: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp. 2205–2208 (2013). https://doi.org/10.1109/Transducers.2013.6627241
5. Hosokawa, K., et al.: A polydimethylsiloxane (PDMS) deformable diffraction grating for monitoring of local pressure in microfluidic devices. J. Micromech. Microeng. 12(1), 1–6 (2002). https://doi.org/10.1088/0960-1317/12/1/301
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