Quartz Micro-machining Using Wire Electrochemical Spark Machining Process
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Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-15-9117-4_8
Reference42 articles.
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2. Rolf Wuthrich JDAZ (2015) Micromachining using electrochemical discharge phenomenon fundamentals and application of spark assisted chemical engraving. https://doi.org/10.1016/b978-0-323-24142-7.12001-3
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4. Singh M, Singh S, Kumar S (2020) Experimental investigation for generation of micro-holes on silicon wafer using electrochemical discharge machining process. Silicon 12:1683–1689. https://doi.org/10.1007/s12633-019-00273-8
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