Author:
Li Mengyang,Hu Qiu,Liu PinKuan,Huang Ming
Reference15 articles.
1. Raparelli, T., Viktorov, V., Colombo, F., et al.: Aerostatic thrust bearings active compensation: critical review. Precis. Eng. 44, 1–12 (2016)
2. Chen, C.H., Tsai, T.H., Yang, D.W., et al.: The comparison in stability of rotor-aerostatic bearing system compensated by orifices and inherences. Tribol. Int. 43(8), 1360–1373 (2010)
3. Miyatake, M., Yoshimoto, S.: Numerical investigation of static and dynamic characteristics of aerostatic thrust bearings with small feed holes. Tribol. Int. 43(8), 1353–1359 (2010)
4. Zhao, G., Belyaev, A., Wolters, C.H., et al.: Stabilizing a substrate using a vacuum preload air bearing chuck: US, US7607647, 27 October 2009
5. Yandayan, T., Akgoz, S.-A., Asar, M.: Calibration of high-resolution electronic autocollimators with demanded low uncertainties using single reading head angle encoders. Measur. Sci. Technol. 25(1), 303–309 (2014)
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