High Vacuum Circumferentially Distributed Quad Mass MEMS Gyroscope Based on All-Silicon Process
Author:
Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-19-2635-8_6
Reference8 articles.
1. Trusov AA, Prikhodko IP, Zotov SA, Shkel AM (2011) Low-dissipation silicon tuning fork gyroscopes for rate and whole angle measurements. IEEE Sensors J. 11(11):2763–2770
2. Prikhodko IP, Zotov SA, Trusov AA, Shkel AM (2011) Sub-degree-per-hour silicon mems rate sensor With 1 Million Q-Factor. In
3. Transducers 20011, Beijing, China, 5-9 June 2011 (2011)
4. Tsanh-Hung S, Nitzan SH, Taheri-Tehrani P, Kline MH et al (2014) Silicon MEMS disk resonator gyroscope with an integrated CMOS analog front-end. IEEE Sensors J. 14(10):3426–3432. https://doi.org/10.1109/JSEN.2014.2335735
5. Acar C, Shkel A (2008) MEMS vibratory gyroscopes: structural approaches to improve robustness. Springer Science & Business Media, Dordrecht, The Netherlands
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