Fabrication of Macro Porous Silicon Structures Using Pulsed Fiber Laser Technique for Capacitive Sensor Application
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Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-15-7219-7_7
Reference28 articles.
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3. Karbassian, F.: Porous Silicon - Porosity - Process, Technologies, and Applications – Chapter (2018)
4. Harraz, F.A.: A highly sensitive and durable electrical sensor for liquid ethanol using thermally-oxidized mesoporous silicon. Superlattices Microstruct. 100, 1064–1072 (2016)
5. Harraz, F.A., Ismail, A.A., Bouzid, H., Al-Sayari, S.A., Al-Hajry, A., Al- Assiri, M.S.: A capacitive chemical sensor based on porous silicon for detection of polar and non-polar organic solvents. Appl. Surf. Sci. 307, 704–711 (2014)
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