1. Hoivik ND, Elam JW, Linderman RJ, Bright VM, George SM, Lee Y (2003) Atomic layer deposited protective coatings for micro-electromechanical systems. Sens Actuators, A 103(1):100–108
2. Zhuang YX, Hansen O, Knieling T, Wang C, Rombach P, Lang W, Benecke W, Kehlenbeck M, Koblitz J (2006) Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction. J Micromech Microeng 16(11):2259–2264
3. Greer JR (2007) Effective use of focused ion beam (FIB) in investigating fundamental mechanical properties of metals at the sub-micron scale. In: Materials research society symposium proceedings 2007. Cambridge University Press, Cambridge, pp 0983-LL0908-0903
4. Jennings AT, Gross C, Greer F, Aitken ZH, Lee S-W, Weinberger C, Greer J (2012) Higher compressive strengths and the Bauschinger effect in conformally passivated copper nanopillars. Acta Mater 60(8):3444–3455
5. Lee S-W, Jennings AT, Greer JR (2013) Emergence of enhanced strengths and Bauschinger effect in conformally passivated copper nanopillars as revealed by dislocation dynamics. Acta Mater 61(6):1872–1885