Microelectromechanical Systems (MEMS)-Based Testing of Materials
Author:
Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-10-6855-3_45-1
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4. Que L, Park J-S, Gianchandani YB. Bent-beam electrothermal actuators-part I: single beam and cascaded devices. J Microelectromech Syst. 2001;10(2):247–54.
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