1. d’Agostino R, Flamm DL (1981) Plasma etching of Si and SiO2 in SF6-O2 mixtures. J Appl Phys 52(1):162–167
2. Ali MH, Wu B, Dougal RA (2010) An overview of SMES applications in power and energy systems. IEEE Tras Sustain Energ 1(1):38–47
3. Bhardwaj J, Ashraf H, McQuarrie A (1997) Dry silicon etching for MEMS. In: Proceedings of symposium on microstructures and microfabricated systems at the annual meeting of the electrochemical society, May 4–9
4. Gimkiewicz C, Hagedorn D, Jahns J, Kley EB, Thoma F (1999) Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass. Appl Opt 38(14):2986–2990
5. Griss P, Stemme G (2003) Side-opened out-of-plane microneedles for microfluidic transdermal liquid transfer. J Microelectromech Syst 12(3):296–301