1. Abdelghani, L., Nasr-Eddine, M., Azouza, M., Abdellah, B., Moadh, K.: Modeling of silicon MEMS capacitive pressure sensor for biomédical applications. In: 2014 9th International Design and Test Symposium (IDT), pp. 263–266. IEEE (2014)
2. Ko, W.H., Wang, Q.: Touch mode capacitive pressure sensors for industrial applications. In: Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, pp. 284–289. IEEE (1997)
3. Rey, P., Charvet, P., Delaye, M.T., Abou Hassan, S.: A high density capacitive pressure sensor array for fingerprint sensor application. In: Proceedings of International Solid State Sensors and Actuators Conference (Transducers’ 97), vol. 2, pp. 1453–1456. IEEE (1997)
4. Hamanaka, M.E., Segundo, A.K.R., da Silva, S.A.L.: Portable non-invasive capacitive transducer for measuring fuel level. In: 2017 IEEE SENSORS, pp. 1–3 (IEEE)
5. Qiu, L.: Fingerprint sensor technology. In: 2014 9th IEEE Conference on Industrial Electronics and Applications, pp. 1433–1436. IEEE (2014)