MEMS Piezoelectric Vibration Energy Harvesters
Author:
Publisher
Springer Netherlands
Link
http://link.springer.com/content/pdf/10.1007/978-981-10-2798-7_40-1
Reference57 articles.
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2. Aktakka EE, Peterson RL, Najafi K (2013) Wafer-level integration of high-quality bulk piezoelectric ceramics on silicon. IEEE Trans Electron Devices 60:2022–2030
3. Anton SR, Sodano HA (2007) A review of power harvesting using piezoelectric materials (2003–2006). Smart Mater Struct 16:R1
4. Barth S, Bartzsch H, Glöß D, Frach P, Modes T, Zywitzki O, Suchaneck G, Gerlach G (2016) Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications. Microsyst Technol 22:1–5
5. Bertacchini A, Scorcioni S, Dondi D, Larcher L, Pavan P, Todaro M T, Campa A, Caretto G, Petroni S, Passaseo A (2011) AlN-based MEMS devices for vibrational energy harvesting applications. In: 2011 proceedings of the European solid-state device research conference (ESSDERC): IEEE, pp 119–122
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