Study of 3D Hexagonal Membrane Structure for MEMS-Based Ultrasonic Transducer Using Finite Element Method

Author:

Maity Reshmi,Maity N. P.,Guha K.,Srinivasa Rao K.,Girija Sravani K.,Baishya S.

Publisher

Springer Singapore

Reference15 articles.

1. Cezar M (2011) Development and microfabrication of capacitive micromachined ultrasound transducers with diamond membranes. MS thesis, Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey

2. Chhikara A, Malik S (2014) Parameters affecting performance of capacitive micro machined ultrasonic transducer (CMUT). Int J Appl Sci Eng Res 3(2):333–338

3. Maity R, Maity NP, Srinivasa Rao K, Guha K, Baishya S (2018) A new compact analytical model of nano-electro-mechanical-systems based capacitive micromachined ultrasonic transducers for pulse echo imaging. J Comput Electron 17(3):1334–1342

4. Maity R, Maity NP, Guha K, Baishya S (2018) Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers. Microsyst Technol. https://doi.org/10.1007/s00542-018-4040-x

5. Malik S, Duhan M, Chhikara A (2015) Designing a capacitive micro-machined ultrasonic transducer cell for high frequency application. Int J Sci Technol Manag 04:563–567

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