Aspect Ratio Approximation for Simultaneous Minimization of Cross Axis Sensitivity Along Off-Axes for High-Performance Non-invasive Inertial MEMS
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Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-99-4495-8_36
Reference6 articles.
1. S. Kal, S. Das, D.K. Maurya, K. Biswas, A. Ravi Sankar, S.K. Lahiri, CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity. J. Microelectron. 37(1), 22–30 (2006)
2. T. Hiller, L. Blocher, M. Vujadinović, Z. Péntek, A. Buhmann, H. Roth, Analysis and compensation of cross-axis sensitivity in low-cost MEMS, in Inertial Sensors, IEEE International Symposium on Inertial Sensors and Systems (INERTIAL). (Kailua-Kona, HI, USA, 2021), pp. 1–4
3. L. Chang, Piezoresistive Sensors, Foundation of MEMS (NG Prentice Hall, 2006)
4. S. Biswas, A.K. Gogoi, Design of a Piezoresistive Microaccelerometer with high sensitivity for medical diagnostic, in Proceedings of Advances in Systems, Control and Automation, Lecture Notes in Electrical Engineering, vol. 442 (Singapore: Springer, 2018), pp. 481–490
5. R. Kampen, R. Wolffenbuttel, Modelling the mechanical behaviour of bulk micromachining silicon accelerometer. Sens. Actuators, A. 64, 137–150 (1998)
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