Laser–plasma–source debris-related investigations: an aspect of the ENEA micro-exposure tool

Author:

Bollanti S.,Di Lazzaro P.,Flora F.,Mezi L.,Murra D.,Torre A.

Publisher

Springer Science and Business Media LLC

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference27 articles.

1. Proc. SPIE;B. Lai,1985

2. K. Hoh, H. Tanino, Bull. Electrotech. Lab. 49, 47 (1985)

3. H. Kinoshita, K. Kurihara, Y. Ishii, Y. Torii, J. Vac. Sci. Technol. B 7, 1648 (1989)

4. C.G. Willson, B.J. Roman, ACS Nano 2(7), 1323 (2008); also at http://pubs.acs.org/cgi-bin/article.cgi/ancac3/2008/2/i07/pdf/nn800410c.pdf

5. in Symp. SEMATECH EUVL, Lake Tahoe, California, 28 September–2 October 2008. The SEMATECH symposia related material can be found at http://www.ematech.org/meetings/archives.htm

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