1. K. Ikuta, K. Hirowatari: in Proc. IEEE Int. Workshop Micro Electro Mechanical Systems, 1994, p. 1
2. S. Shoji, N. Smith, S. Kawata: Proc. SPIE 3740, 541 (1999)
3. T. Hayashi: Micro Machines & Materials (CMC, Japan 1999)
4. H. Ukita: Optomechatronics (Morikita Shuppan, Japan 2001) pp. 60–124
5. S. Maruo, S. Kawata: in Proc. IEEE Int. Workshop Micro Electro Mechanical Systems, 1997, pp. 169–174