Author:
Espinosa H. D.,Prorok B. C.,Peng B.,Kim K. H.,Moldovan N.,Auciello O.,Carlisle J. A.,Gruen D. M.,Mancini D. C.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Reference37 articles.
1. Bustillo, J.M., Howe, R.T., andMuller, R.S., “Surface Micromachining for Microelectromechanical Systems,”Proc. IEEE,86,1552–1574 (1998).
2. Sniegowski, J.J. andde Boer, M.P., “IC-compatible Polysilicon Surface Micromachining,”Annu. Rev. Mater. Res.,30,299–333 (2000).
3. Bhushan, B., Tribology Issues and Opportunities in MEMS, Kluwer Academic, Dordrecht (1998).
4. de Boer, M.P. andMayer, T.M., “Tribology of MEMS,”MRS Bulletin,4,302–304 (2001).
5. Gruen, D., “Nanocrystalline Diamond Films,”Annu. Rev. Mater. Sci.,29,211–259 (1999).
Cited by
72 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献