1. B. Dong, H. Cai, J. M. Tsai, D. L. Kwong, and A. Q. Liu, “An on-chip opto-mechanical accelerometer,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (MEMS), Taipei, pp. 641–644, 2013.
2. K. Zandi, J. A. Belanger, and Y. A. Peter, “Design and demonstration of an in-plane silicon-on-insulator optical MEMS Fabry-perot-based accelerometer integrated with channel waveguides,” Journal of Microelectromechanical Systems, 2012, 21(6): 1464–1470.
3. H. Seidel, U. Fritsch, R. Gottinger, J. Schalk, J. Walter, and K. Ambaum, “A peiezoresistive silicon accelerometer with monolithically integrated CMOS-circuitry,” in the 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95, Stockholm, Sweden, pp. 597–600, 1995.
4. C. Yeh and K. Najafi, “A low-voltage bulk-silicon tunneling-based microaccelerometer,” in International Electron Devices Meeting, 1995, Washington, DC, pp. 593–596, 1995.
5. A. M. Leung, J. Jones, E. Czyzewska, J. Chen, and B. Woods, “Micromachened accelerometer based on convection heat transfer,” in Proceeding of IEEE Micro Electro Mechanical Systems Workshop (MEMS’98), Heidelberg, Germany, pp. 627–630, 1998.