Review of advanced CMOS technology for post-Moore era

Author:

Li Ming

Publisher

Springer Science and Business Media LLC

Subject

General Physics and Astronomy

Reference63 articles.

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3. Pollack F. Intel 1999. In: The International Technology Roadmap for Semiconductors, 2005

4. Wang Y Y, Wang Y W. The road of development for integrated circuits in mainland china (in Chinese). Beijing: Science Press, 2008. 244

5. Mistry K, Allen C, Auth C, et al. A 45 nm Logic Technology with High-k+Metal Gate Transistors, Strained Silicon, 9 Cu Interconnect Layers, 193nm Dry Patterning, and 100% Pb-free Packaging. In: International Electron Devices Meeting, IEEE, 2007. 247–250

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