Author:
Zhu XiaoYang,Cheng Gang,Wang ShuJie,Dai ShuXi,Wan ShaoMing,Zhang XingTang,Du ZuLiang
Publisher
Springer Science and Business Media LLC
Reference9 articles.
1. Tseng A A, Notargiacomo A, Chen T P. Nanofabrication by scanning probe microscope lithography: A review. J Vac Sci Tech B, 2005, 23(3): 877–894
2. He G H, Yang X H. The progress on nanofabrication based on scanning probe microscopy. Microelectronics, 2005, 35(2): 169–173
3. Zhu J M, Zhang H J, Zhang D X. The design of AFM nanofabrication system. Opt Instrum, 2005, 27(2): 76–79
4. Magno R, Bennett B R. Nanostructure patterns written in III–V semiconductors by an atomic force microscope. Appl Phys Lett, 1997, 70(14): 1855–1857
5. Muller M, Fiedler T, Groger R. Controlled structuring of mica surfaces with the tip of an atomic force microscope by mechanically induced local etching. Surf Interf Anal, 2004, 36: 189–192
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