Correlation of Microstructural and Mechanical Properties of CVD Deposited TiAlN Coatings
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/s13369-019-04202-0.pdf
Reference35 articles.
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3. Guha, S.; Das, S.; Bandyopadhyay, A.; Das, S.; Swain, B.P.: Investigation of structural network and mechanical properties of Titanium silicon nitride (TiSiN) thin films. J. Alloys Compd. 731, 347–353 (2018)
4. Das, S.; Guha, S.; Ghadai, R.; Kumar, D.; Swain, B.P.: Structural and mechanical properties of CVD deposited titanium aluminium nitride (TiAlN) thin films. Appl. Phys. A 123, 412 (2017)
5. Guha, S.; Das, S.; Bandyopadhyay, A.; Das, S.; Swain, B.P.: Investigation of mechanical properties of CVD grown titanium silicon nitride thin films under reduced atmosphere. Appl. Phys. A 124, 35 (2018)
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