A Low-Nonlinearity Laser Heterodyne Interferometer with Quadrupled Resolution in the Displacement Measurement
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/s13369-010-0017-5.pdf
Reference19 articles.
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2. Demarest FC (1998) High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics. Meas Sci Technol 9: 1024–1030
3. Cosijns SJAG, Haitjema H, Schellekens PHJ (2002) Modeling and verifying non-linearities in heterodyne displacement interferometry. Precision Eng 26: 448–455
4. Hou W, Zhang Y, Hu H (2009) A simple technique for eliminating the nonlinearity of a heterodyne interferometer. Meas Sci Technol 20: 1–6
5. Quenelle RC (1983) Nonlinearity in interferometric measurements. Hewlett-Parkard J 34(4): 10
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