Residual Layer Removal of Technical Glass Resulting from Reactive Atmospheric Plasma Jet Etching by Pulsed Laser Irradiation
Author:
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s11090-020-10101-2.pdf
Reference15 articles.
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3. Arnold T, Boehm G, Fechner R, Meister J, Nickel A, Frost F, Haensel T, Schindler A (2010) Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook. Nuclear Instrum Methods Phys Res Sect Accel Spectrom Detectors Assoc Equip 616(2–3):147–156. https://doi.org/10.1016/j.nima.2009.11.013
4. Fanelli F, Fracassi F (2017) Atmospheric pressure non-equilibrium plasma jet technology: general features, specificities and applications in surface processing of materials. Surf Coat Technol 322:174–201. https://doi.org/10.1016/j.surfcoat.2017.05.027
5. Kazemi F, Boehm G, Arnold T (2019) Ultra-precise surface machining of N-BK7 using microwave-driven reactive plasma jet machining. In: Optics and Measurement 2019 International Conference, OAM. SPIE
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