Investigation of the Expansion of an Oxygen Microwave Remote Plasma for the Growth of Functional Oxide Thin Films
Author:
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s11090-016-9757-7.pdf
Reference32 articles.
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3. Gudmundsson JT (2004) Recombination and detachment in oxygen discharges: the role of metastable oxygen molecules. J Phys D Appl Phys 37:2073–2081
4. Normand F, Granier A, Leprince P, Marec J, Shi MK, Clouet F (1995) Polymer treatment in the flowing afterglow of an oxygen microwave discharge: active species profile concentrations and kinetics of the functionalization. Plasma Chem Plasma Process 15:173–198
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