Numerical Simulation and Experimental Investigation on Etching Process of Atmospheric Pressure Cold Plasma Jet with Shielding Gas-Reference-Cited by-同舟云学术

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Numerical Simulation and Experimental Investigation on Etching Process of Atmospheric Pressure Cold Plasma Jet with Shielding Gas

Published:2022-01-04 Issue:2 Volume:42 Page:321-337
ISSN:0272-4324
Container-title:Plasma Chemistry and Plasma Processing
language:en
Short-container-title:Plasma Chem Plasma Process

Author:

Lv Li,Wang Tao,Wang Jia-Hao,Wang Sheng-Quan,Shi Li-Ping,Li Meng,Chen Si-Le,Tu De-Yu

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry

Link

https://link.springer.com/content/pdf/10.1007/s11090-021-10226-y.pdf

Reference39 articles.

1. Gotoha K, Shohbukeb E, Kobayashic Y, Yamada H (2018) Wettability control of PET surface by plasma-induced polymer film deposition and plasma/UV oxidation in ambient air. Colloids Surf A 556:1–10

2. Chen F-Z, Xu W-J, Yao L, Song J-L, Huang S, Wang L, Parkin IP, Liu X (2015) Hydrophilic patterning of superhydrophobic surfaces by atmospheric pressure-pressure plasma jet. Micro Nano Lett 10(2):105–108

3. Ghosh A, Ganguly R, Schutzius TM, Megaridis CM (2014) Wettability patterning for high-rate, pumpless fluid transport on open, non-planar microfluidic platforms. Lab Chip 14:1538–1550

4. Lee C, Cho H, Kim D, Hwang W (2014) Fabrication of patterned surfaces that exhibit variable wettability ranging from superhydrophobicity to high hydrophilicity. Appl Surf Sci 288:619–624

5. Elsharkawy M, Schutzius TM, Megaridis CM (2014) Inkjet patterned superhydrophobic paper for open-air surface microfluidic devices. Lab Chip 14:1168–1175

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1. Removal and Surface Effects of Atmospheric Pressure Plasma Jet on Organic Pollutants in Gratings;2024 IEEE International Conference on Plasma Science (ICOPS);2024-06-16

2. Study on Precursor Distribution of a No-inner-wall Deposition Atmospheric Pressure Plasma Jet Used for Thin Film Deposition;Plasma Chemistry and Plasma Processing;2024-02-11

3. Study on Precursor Distribution of a No-inner-wall Deposition Atmospheric Pressure Plasma Jet Used for Thin Film Deposition;2023-11-01

4. Improvement of the spreading effect of atmospheric pressure microplasma jet treatment through shielding-gas-controlled focusing;Plasma Science and Technology;2022-07-13

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