Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation-Reference-Cited by-同舟云学术

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Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation

Published:1998-01-01 Issue:1 Volume:66 Page:83-86
ISSN:0947-8396
Container-title:Applied Physics A: Materials Science & Processing
language:
Short-container-title:Applied Physics A: Materials Science & Processing

Author:

Sánchez F.,Morenza J.L.,Aguiar R.,Delgado J.C.,Varela M.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s003390050641.pdf

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