Low contact resistance of n + -Si/Ti/WN x /Al submicron contact structures
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Published:1997-05-01
Issue:5
Volume:64
Page:497-499
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ISSN:0947-8396
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Container-title:Applied Physics A: Materials Science & Processing
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language:
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Short-container-title:Applied Physics A: Materials Science & Processing
Author:
Kim Yong Tae,Lee Chang Woo
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry