Influence of oxygen concentration on optical properties of semi-insulating polycrystalline silicon films
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Published:1996-11-01
Issue:5
Volume:63
Page:495-503
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ISSN:0947-8396
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Container-title:Applied Physics A: Materials Science & Processing
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language:
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Short-container-title:Applied Physics A: Materials Science & Processing
Author:
Kuc˘irková A.,Navrátil K.,Pajasová L.,Vorlíc˘ek V.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry