Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Reference35 articles.
1. R. Koch, A.K. Das, H. Yamaguchi, C. Pampuch, A. Ney, Perpendicular magnetic fields in cantilever beam magnetometry. J. Appl. Phys. 96, 2773–2778 (2004)
2. A. Kumar, C. Periasamy, B.D. Pant, Cantilever based MEMS pressure sensor using different Piezoelectric Materials: a comparative study. IJEDR 2, 4022–4026 (2014)
3. N.V. Lavrik, M.J. Sepaniak, P.G. Datskos, Cantilever transducers as a platform for chemical and biological sensors. Rev. Sci. Instrum. 75, 2229–2253 (2004)
4. A. Boisen, J. Thaysen, H. Jensenius, O. Hansen, Environmental sensors based on micromachined cantilevers with integrated read-out. Ultramicrosc. 82, 11–16 (2000)
5. S. Chatzandroulis, A. Tserepi, D. Goustouridis, P. Normand, D. Tsoukalas, Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor. Microelectron. Eng. 61–62, 955–961 (2002)