Author:
Vogl Gregory W.,Nayfeh Ali H.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Applied Mathematics,Mechanical Engineering,Ocean Engineering,Aerospace Engineering,Control and Systems Engineering
Reference25 articles.
1. Haller, M.I., Khuri-Yakub, B.T.: A surface micromachined electrostatic ultrasonic air transducer. In: Proc. of IEEE Ultrasonics Symp. Cannes, France, Vol. 2, pp. 1241–1244 (1994)
2. Ladabaum, I., Khuri-Yakub, B.T., Spoliansky, D., Haller, M.I.: Micromachined ultrasonic tranducers (MUTs). In: Proc. of IEEE Ultrasonics Symp, Seattle, WA Vol. 1, pp. 501–504 (1995)
3. Haller, M.I., Khuri-Yakub, B.T.: A surface micromachined electrostatic ultrasonic air transducer. IEEE Trans. Ultrason., Ferroelectr. Freq. Control 43, 1–6 (1996)
4. Jin, X., Ladabaum, I., Khuri-Yakub, B.T.: The microfabrication of capacitive ultrasonic transducers. J. Microelectromech. Syst. 7, 295–302 (1998)
5. Hansen, S.T., Turo, A., Degertekin, F.L., Khuri-Yakub, B.T.: Characterization of capacitive micromachined ultrasonic transducers in air using optical measurements. In: Proc. of IEEE Ultrasonics Symp. San Juan, Puerto Rico Vol. 1, pp. 947–950 (2000)
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献