Dynamic evolution of a primary resonance MEMS resonator under prebuckling pattern-Reference-Cited by-同舟云学术

Dynamic evolution of a primary resonance MEMS resonator under prebuckling pattern

Published:2018-05-17 Issue:4 Volume:93 Page:2357-2378
ISSN:0924-090X
Container-title:Nonlinear Dynamics
language:en
Short-container-title:Nonlinear Dyn

Author:

Han Jianxin^ORCID,Jin Gang,Zhang Qichang,Wang Wei,Li Baizhou,Qi Houjun,Feng Jingjing

Funder

National Natural Science Foundation of China

Tianjin Research Program of Application Foundation and Advanced Technology

Innovation Team Training Plan of Tianjin Universities and colleges

Tianjin Science and Technology Planning Project

Scientific Research Program of Tianjin Education Committee

Scientific Research Foundation of Tianjin University of Technology and Education

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Applied Mathematics,Mechanical Engineering,Ocean Engineering,Aerospace Engineering,Control and Systems Engineering

Link

http://link.springer.com/article/10.1007/s11071-018-4329-4/fulltext.html

Reference46 articles.

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2. Lee, K.B.: Principles of Microelectromechanical Systems. Wiley, Hoboken (2011)

3. Zhang, W.M., Yan, H., Peng, Z.K., Meng, G.: Electrostatic pull-in instability in MEMS/NEMS: a review. Sens. Actuators A Phys. 214, 187–218 (2014)

4. Leus, V., Elata, D.: On the dynamic response of electrostatic MEMS switches. J. Microelectromech. Syst. 17, 236–243 (2008)

5. Kacem, N., Hentz, S., Pinto, D., Reig, B., Nguyen, V.: Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors. Nanotechnology 20, 275501 (2009)

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