Author:
Liu Chin-Chia,Liu Chien-Hung
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Applied Mathematics,Mechanical Engineering,Ocean Engineering,Aerospace Engineering,Control and Systems Engineering
Reference29 articles.
1. Bertarelli, E., Corigliano, A., Greiner, A., Korvink, J.G.: Design of high stroke electrostatic micropumps: a charge control approach with ring electrodes. Microsyst. Technol. 17, 165–173 (2011)
2. Scheeper, P.R., Donk, A.G.H., Olthuis, W., Bergveld, P.: Fabrication of silicon condenser microphones using single wafer technology. J. Microelectromech. Syst. 1(3), 147–154 (1992)
3. Towfighian, S., Heppler, G.R., Abdel-Rahaman, E.M.: Low-voltage closed loop MEMS actuators. Nonlinear Dyn. 69, 565–575 (2012)
4. Nayfeh, A.H., Younis, M.I., Abdel-Rahman, E.M.: Dynamic pull-in phenomenon in MEMS resonators. Nonlinear Dyn. 48, 153–163 (2007)
5. Chen, C.K., Lai, H.Y., Liu, C.C.: Nonlinear dynamic behavior analysis of micro electrostatic actuator based on a continuous model under electrostatic loading. ASME J. Appl. Mech. 78, 031003-1–031003-9 (2011)
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献