Author:
Tsai Nan-Chyuan,Sue Chung-Yang
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Applied Mathematics,Mechanical Engineering,Ocean Engineering,Aerospace Engineering,Control and Systems Engineering
Reference22 articles.
1. Miller, L.M.: MEMS for space applications. Proc. SPIE 3680, 2–11 (1999). International Society for Optical Engineering
2. Xie, H., Fedder, G.K.: Integrated microelectromechanical gyroscopes. J. Aerosp. Eng. 16(2), 65–75 (2003). doi: 10.1061/(ASCE)0893-1321(2003)16:2(65)
3. Alper, S.E., Akin, T.: A symmetric surface micromachined gyroscope with decoupled oscillation modes. Sens. Actuators A Phys. 97-98(1), 347–358 (2002). doi: 10.1016/S0924-4247(01)00860-3
4. Ayazi, F., Najafi, K.: A HARPSS polysilicon vibrating ring gyroscope. J. MEMS 10(2), 169–179 (2001)
5. Shkel, A.M., Horowitz, R., Seshia, A.A., Park, S., Howe, R.T.: Dynamics and control of micromachined gyroscopes. In: Proceedings of ACC, pp. 2119–2124. San Diego, CA, June 02–04 (1999)
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献