Approximation to the two-step diffusion profile by a series of gaussian functions-Reference-Cited by-同舟云学术

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Approximation to the two-step diffusion profile by a series of gaussian functions

Published:1988-08 Issue:4 Volume:46 Page:281-283
ISSN:0947-8396
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Lee Wei-Yu,Wang Way-Seen

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF01210347.pdf

Reference6 articles.

1. S.K. Gandhi:The Theory and Practice of Microelectronics (Wiley, New York 1968) Chap. 4, pp. 78–85

2. D.P. Kennedy, P.C. Murley: Proc. IEEE52, 620 (1964)

3. A.B. Bhattacharyya, T.N. Basavaraj: IEEE Trans. ED-20, 509 (1973)

4. R. Shrivastava, A.H. Marshak: Proc. IEEE65,1614 (1977)

5. W.S. Wang: Proc. IEEE71,179 (1983)

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1. An investigation of the diffusion of silicon in delta‐doped gallium arsenide, as determined using high‐resolution secondary ion mass spectrometry;Journal of Applied Physics;1991-07-15

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