A piecewise thickness-function to the interferometric measurement of the optically transparent thin films-Reference-Cited by-同舟云学术

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A piecewise thickness-function to the interferometric measurement of the optically transparent thin films

Published:2023-12-14 Issue:2 Volume:56 Page:
ISSN:0306-8919
Container-title:Optical and Quantum Electronics
language:en
Short-container-title:Opt Quant Electron

Author:

Gasca-Figueroa D.,García-Rodríguez F. J.,Castro-Beltrán R.,Pérez-Pinal F. J.,Vélez-García R. D.,Gutiérrez-Juárez G.

Funder

Tecnológico Nacional de México en Celaya

Consejo Nacional de Humanidades, Ciencia y Tecnología-México

Universidad de Guanajuato

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s11082-023-05728-2.pdf

Reference52 articles.

1. Borgetto, N., Galizzi, C., André, F., Escudié, D.: A thickness measurement technique based on low-coherence interferometry applied to a liquid film with thermal gradient. Exp. Therm. Fluid. Sci. 34(8), 1242–1246 (2010). https://doi.org/10.1016/j.expthermflusci.2010.05.004

2. Brakke, K.A.: The surface evolver. Exp. Math. 1(2), 141–165 (1992). https://doi.org/10.1080/10586458.1992.10504253

3. Conroy, M.: Advances in thick and thin film analysis using interferometry. Wear 266(5–6), 502–506 (2009). https://doi.org/10.1016/j.wear.2008.04.079

4. Dai, H., Shen, Y., Zhou, H., Cai, X.: Effects of step slope on thickness measurement by optical interferometry for opaque thin films. Thin Solid Films 516(8), 1796–1802 (2008). https://doi.org/10.1016/j.tsf.2007.07.209

5. Deck, L., de Groot, P.: High-speed non-contact profiler based on scanning white light interferometry. Int. J. Mach. Tools Manuf 35(2), 147–150 (1995). https://doi.org/10.1016/0890-6955(94)P2365-M

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