CO2 laser-induced micro-plume treatment of silicon: technique and application-Reference-Cited by-同舟云学术

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CO2 laser-induced micro-plume treatment of silicon: technique and application

Published:2019-11-19 Issue:12 Volume:51 Page:
ISSN:0306-8919
Container-title:Optical and Quantum Electronics
language:en
Short-container-title:Opt Quant Electron

Author:

Gresko Vladislav,Rymkevich Vladimir,Samokhvalov Andrey,Veiko Vadim,Sergeev Maksim

Funder

Ministry of Education and Science of the Russian Federation

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11082-019-2121-4.pdf

Reference11 articles.

1. Chandler-Horowitz, D., Amirtharaj, P.M.: High-accuracy, midinfrared (450 cm − 1 ⩽ ω ⩽ 4000 cm−1) refractive index values of silicon. J. Appl. Phys. 97(12), 123526 (2005)

2. Goodman, J.W.: Introduction to Fourier Optics. Roberts and Company Publishers, Englewood (2005)

3. Kischkat, J., Peters, S., Gruska, B., Semtsiv, M., Chashnikova, M., Klinkmüller, M., Fedosenko, O., Machulik, S., Aleksandrova, A., Monastyrskyi, G.: Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride. Appl. Opt. 51(28), 6789–6798 (2012)

4. Kostyuk, G., Sergeev, M., Zakoldaev, R., Yakovlev, E.: Fast microstructuring of silica glasses surface by NIR laser radiation. Opt. Lasers Eng. 68, 16–24 (2015)

5. Kostyuk, G.K., Zakoldaev, R.A., Koval, V.V., Sergeev, M.M., Rymkevich, V.S.: Laser microplasma as a tool to fabricate phase grating applied for laser beam splitting. Opt. Lasers Eng. 92, 63–69 (2017)

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