Microchannels fabrication in nanoporous silicate matrix by femtosecond direct laser writing and subsequent chemical etching-Reference-Cited by-同舟云学术

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Microchannels fabrication in nanoporous silicate matrix by femtosecond direct laser writing and subsequent chemical etching

Published:2023-02-13 Issue:4 Volume:55 Page:
ISSN:0306-8919
Container-title:Optical and Quantum Electronics
language:en
Short-container-title:Opt Quant Electron

Author:

Barhoum Khaled,Shishkina Alena S.,Zakoldaev Roman A.,Andreeva Olga V.

Funder

NIRMA grant of School of Physics and Engineering of ITMO University

Russian Science Foundation

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s11082-023-04558-6.pdf

Reference18 articles.

1. Butkutė, A., Jonušauskas, L.: 3d manufacturing of glass microstructures using femtosecond laser. In Micromachines. Issue 5). MDPI AG. 12 (2021). https://doi.org/10.3390/mi12050499

2. Bykov, E.P., Zakoldaev, R.A., Andreeva, N.V., Shishkina, A.S., Yandybaeva, Y.I., Andreeva, O.V.: Production of nanoporous silicate matrices—problems of optical homogeneity. J. Opt. Technol. 89(3), 161 (2022). https://doi.org/10.1364/jot.89.000161

3. Cheng, Y.: Internal laser writing of high-aspect-ratio microfluidic structures in silicate glasses for lab-on-a-chip applications. In Micromachines (Vol. 8, Issue 2). MDPI AG. (2017). https://doi.org/10.3390/mi8020059

4. Crespi, A., Osellame, R., Bragheri, F.: Femtosecond-laser-written optofluidics in alumino-borosilicate glass. Opt. Materials: X. 4, 100042 (2019). https://doi.org/10.1016/j.omx.2019.100042

5. Hnatovsky, C., Taylor, R.S., Simova, E., Bhardwaj, V.R., Rayner, D.M., Corkum, P.B.: Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica. In OPTICS LETTERS (Vol. 230, Issue 14). (2005)

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