Monitoring the Quality of Ultra-Pure Water in the Semiconductor Industry by Online Ion Chromatography
Author:
Publisher
Springer Science and Business Media LLC
Subject
Analytical Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00604-005-0427-3.pdf
Reference24 articles.
1. International Technology Roadmap for Semiconductors, 2004 Update, Overall Roadmap Technology Characteristics. SEMATECH, Austin, TX
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3. Quantification issues of trace metal contaminants on silicon wafers by means of TOF-SIMS, ICP-MS, and TXRF
4. Quantitation of anions at parts-per-trillion levels in semiconductor pure water by means of a laboratory ion chromatograph
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