1. J.M. Arias, J.G. Pasko, M. Zandian, J. Bajaj, L. Kozolowsky, R.E. DeWames and W.E. Tenant,SPIE 2228, 210 (1994).
2. P.W. Norton, P.L. LoVecchio, G.N. Pultz, J. Hughes, T. Robertson, V. Lukach and K. Wong,SPIE 2228, 73 (1994).
3. T. Tung, L.V. DeArmond, R.F. Herald, P.E. Herning, M.H. Kalisher, D.A. Olson, R.F. Risser, A.P. Stevens and S.J. Tighe,SPIE 1735, 109 (1992).
4. Y. Nemirovsky and G. Bahir,J. Vac. Sci. Technol. A 7, 450 (1989).
5. W.E. Tennant, C.A. Cockrum, J.B. Gilpin, M.A. Kinch, M.B. Reine and R.P. Ruth,J. Vac. Sci. Technol. B 10 (4), 1359 (1992).