CVD Deposition of Binary AlSb and GaSb Material Films -- a Single-Source Approach

Author:

Schulz Stephan

Publisher

Springer-Verlag

Reference68 articles.

1. AlN is better described as an isolator due to its large direct bandgap of 6.28 eV. Its high melting point (3000 °C) and high thermal conductivity (2.6 Wcm-1 K-1) renders AlN very useful for high power applications

2. (a) Didchenko R, Alix JD, Toeniskoettler RHJ (1960) Inorg Chem 4:35;

3. (b) Harrison B, Tomkins EH (1962) Inorg Chem 1:951;

4. (c) Manasevit HM (1968) Appl Phys Lett 12:156

5. See for example: (a) Jones AC, O'Brien P (1997) CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications. VCH, Weinheim;

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