Ultra-precision Machining of Micro-step Pillar Array Using a Straight-Edge Milling Tool
Author:
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Materials Science (miscellaneous)
Link
http://link.springer.com/content/pdf/10.1007/s41871-020-00076-1.pdf
Reference23 articles.
1. Fang FZ, Zhang N, Guo DM, Yamamura K, Cheung B, Liu K, Ehmann K (2019) Towards atomic and close-to-atomic scale manufacturing. Int J Extreme Manuf 1(1):012001
2. Zhang ZY, Yan JW, Kuriyagawa T (2019) Manufacturing technologies toward extreme precision. Int J Extreme Manuf 1(2):022001
3. Fang FZ, Liu K, Kurfess TR, Lim GC (2006) Tool-based micro machining and applications in MEMS. In: Leondes CT (ed) MEMS/NEMS handbook: techniques and applications. Springer, Boston, pp 678–840
4. Chae J, Park SS, Freiheit T (2006) Investigation of micro-cutting operation. Int J Mach Tools Manuf 46(3–4):313–332
5. O’Hara J, Fang FZ (2019) Advances in micro cutting tool design and fabrication. Int J Extreme Manuf 1(3):032003
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