Influence of water absorption by silicate glass on the strains in passivated Al conductor lines-Reference-Cited by-同舟云学术

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Influence of water absorption by silicate glass on the strains in passivated Al conductor lines

Published:1998-07 Issue:7 Volume:27 Page:853-857
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Kuschke W. -M.,Carstanjen H. -D.,Pazarkas N.,Plachke D. -W.,Arzt E.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-998-0109-0.pdf

Reference22 articles.

1. W.-M. Kuschke and E. Arzt, Appl. Phys. Lett. 64, 1097 (1994).

2. P.R. Besser, T.N. Marieb, J. Lee, P.A. Flinn and J.C. Bravman, J. Mater. Res. 11, 184 (1996).

3. P.A. Flinn, MRS Symp. Proc. 130, (Pittsburgh, PA: Mater. Res. Soc., 1989), p. 41.

4. L. Doucet and G. Carlotti, MRS Symp. Proc. 356, (Pittsburgh, PA: Mater. Res. Soc., 1995), p. 215.

5. S. Rojas, L. Zanotti, A. Borghesi, A. Sassella and G.U. Pignatel, J. Vac. Sci. Technol. B 11, 2081 (1993).

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Water Penetration on the Strength and Toughness of Silica Glass;Journal of the American Ceramic Society;2011-05-25

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