Validation of compact models of microcantilever actuators for RF-MEMS design
Author:
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing
Link
http://link.springer.com/content/pdf/10.1007/s10470-008-9253-y.pdf
Reference19 articles.
1. Rebeiz, G. (2003). RF-MEMS: Theory design and technology. Hoboken, NJ: John Wiley Intersciences.
2. De Bona, F., & Enikov, E. (Eds.). (2006). Microsystems Mechanical Design, CISM Lectures Series. Springer Verlag. ISBN: 3-211-37453-1.
3. Senturia, S. D. (2001). Microsystems design. Boston: Kluwer.
4. Najar, F., et al. (2005). Modeling and design of variable-geometry electrostatic microactuators. Journal of Micromechanics and Microengineering, 15, 419–429. doi: 10.1088/0960-1317/15/3/001 .
5. Choi, B., & Lovell, E. G. (1997). Improved analysis of microbeams under mechanical and electrostatic loads. Journal of Micromechanics and Microengineering, 7, 24–29. doi: 10.1088/0960-1317/7/1/005 .
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