RF-MEMS switch design optimization for long-term reliability

Author:

Mulloni Viviana,Solazzi Francesco,Resta Giuseppe,Giacomozzi Flavio,Margesin Benno

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High-reliability circular-contact RF MEMS switches in silicon hermetic package;Journal of Micromechanics and Microengineering;2023-04-21

2. Effect of Ambient on the Field Emission Induced-Damage in Dielectric-Less MEMS Capacitive Structures;IEEE Transactions on Device and Materials Reliability;2022-06

3. Optimization of Thick Photoresist for Uniform Thickness in RF MEMS Applications;Journal of Electronic Materials;2021-09-30

4. Field emission induced-damage in the actuation paths of MEMS capacitive structures;Microelectronics Reliability;2020-11

5. Optimization of shunt capacitive RF MEMS switch by using NSGA-II algorithm and uti-liti algorithm;Informacije MIDEM - Journal of Microelectronics, Electronic Components and Materials;2019-05-07

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