A closed-loop interface for capacitive micro-accelerometers with pulse-width-modulation force feedback-Reference-Cited by-同舟云学术

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A closed-loop interface for capacitive micro-accelerometers with pulse-width-modulation force feedback

Published:2017-11-06 Issue:2 Volume:94 Page:195-204
ISSN:0925-1030
Container-title:Analog Integrated Circuits and Signal Processing
language:en
Short-container-title:Analog Integr Circ Sig Process

Author:

Yin Tao,Ye Zhenhua,Huang Guocheng,Wu Huanming,Yang Haigang

Funder

National Natural Science Foundation of China

National Natural Science Foundation of China (CN)

National Basic Research Program of China

Zhejiang Provincial Natural Science Foundation of China

Project of National Laboratory for Infrared Physics, Chinese Academy of Science

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing

Link

http://link.springer.com/article/10.1007/s10470-017-1064-6/fulltext.html

Reference15 articles.

1. Yazdi, N., Ayazi, F., & Najafi, K. (1998). Micromachined inertial sensors. Proceedings of the IEEE, 86(8), 1640–1659.

2. Chau, K. H. L., Lewis, S. R., Zhao, Y., Howe, R. T., Bart, S. F., & Marcheselli, R. G. (1995). An integrated force-balanced capacitive accelerometer for low-g applications. In The 8th international conference on solid-state sensors and actuators, 1995 and eurosensors IX, Transducers ‘95.

3. Aaltonen, Lasse, & Halonen, Kari. (2009). Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 mg and bandwidth of 300Hz. Sensors and Actuators, A: Physical, 154(1), 46–56.

4. Ye, Zhen-hua, Yang, Hai-gang, Yin, Tao, Huang, Guocheng, & Liu, Fei. (2013). High-performance closed-loop interface circuit for high-q capacitive microaccelerometers. IEEE Sensor Journal, 13(5), 1425–1433.

5. Jiangfeng, W., & Carley, L. R. (2006). Electromechanical delta sigma modulation with high-Q micromechanical accelerometers and pulse density modulated force feedback. IEEE Transactions on Circuits and Systems I: Regular Papers, 53(2), 274–287.

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