A low cross-sensitivity dual-axis silicon-on-insulator accelerometer integrated as a system in package with digital output-Reference-Cited by-同舟云学术

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A low cross-sensitivity dual-axis silicon-on-insulator accelerometer integrated as a system in package with digital output

Published:2013-10-09 Issue:3 Volume:77 Page:345-354
ISSN:0925-1030
Container-title:Analog Integrated Circuits and Signal Processing
language:en
Short-container-title:Analog Integr Circ Sig Process

Author:

Alfaifi Ahmad,Allidina Karim,Nabki Frederic,El-Gamal Mourad N.

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing

Link

http://link.springer.com/content/pdf/10.1007/s10470-013-0186-8.pdf

Reference19 articles.

1. Mounier, E. (2012). MEMS Markets & Applications. 2nd workshop on design, control and software implementation for distributed MEMS.

2. Yole Développement. (2009). MEMS: MEMS accelerometer, gyroscope and IMU market 2008–2013. Retrieved May, 2013, from http://www.yole.fr .

3. Castoldi, L. (2011). The MEMS revolution. Retrieved May, 2013, from http://www.semi.org .

4. Yazdi, N., Ayazi, F., & Najafi, K. (1998). Micromachined inertial sensors. Proceedings of the IEEE, 86(8), 1640–1659.

5. Maluf, N., & Wiliams, K. (2004). An introduction to microelectromechanical systems engineering. Norwood, MA: Artech House.

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